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July 27, 2026 · Tom's Hardware

China starts mass-producing its own deep-UV chipmaking machines

A Shanghai-based, state-backed company has begun mass production of immersion deep ultraviolet (DUV) lithography machines. The first units are due to be delivered this year to Chinese chipmakers SMIC, Hua Hong, and CXMT.

Why it matters: DUV lithography is a critical bottleneck China has been trying to overcome amid US export controls on advanced chipmaking equipment. Domestic mass production, even at older process nodes, reduces China's dependence on foreign toolmakers and strengthens its ability to keep building AI chips despite sanctions.

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