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July 15, 2026 · Tom's Hardware

Intel first to ship logic chips made with High-NA EUV tools

Intel became the first company to ship high-volume logic chips using ASML's High-NA EUV lithography tools. Select layers of its Panther Lake chips on the 18A process are now dual-qualified for the new 0.55 NA scanners.

Why it matters: It's a manufacturing milestone that could affect the pace of future chip scaling for AI hardware.

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