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August 4, 2026 · Tom's Hardware

China's domestic lithography tools still trail for advanced chipmaking

An examination of Chinese chipmaking tool roadmaps finds Beijing's domestic deep ultraviolet (DUV) lithography program is targeting only about five machines a year, while its extreme ultraviolet (EUV) prototype has yet to produce any chips. The piece lays out three markers that would indicate whether China's domestic program becomes a real rival to Western toolmakers.

Why it matters: China's ability to manufacture advanced AI chips domestically hinges on lithography tools it currently can't produce at scale — this is relevant context for ongoing US export-control debates, including the White House's reported consideration of further chip-related hardware restrictions.

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